mask alignment device
Date: 1963
Inventory Number: 2003-1-0136
Classification: Microscope Accessory
Subject:
Maker: Bausch & Lomb Optical Company (1853-present)
Cultural Region:
Place of Origin:
Dimensions:
14 × 15.7 × 12 cm (5 1/2 × 6 3/16 × 4 3/4 in.)
Description:
This is Bausch & Lomb mask alignment device. It converts a standard monocular zoom microscope into a mask alignment microscope.
The instrument has two eyepieces (3.5X) mounted in binocular fashion over prisms. There is a knob for focusing. On the side are two illuminating tubes, each consisting of an iris diaphragm and a removable yellow filter on a rod. The bottom of the binocular tube is threaded.
The instrument has two eyepieces (3.5X) mounted in binocular fashion over prisms. There is a knob for focusing. On the side are two illuminating tubes, each consisting of an iris diaphragm and a removable yellow filter on a rod. The bottom of the binocular tube is threaded.
Signedunsigned
FunctionA mask alignment microscope is a comparison microscope for viewing two objects simultaneously in microfabrication research laboratories. It permits checking and accurate alignment of registration marks on photomasks and substrates (called wafers).